Numéro
J. Phys. Colloques
Volume 42, Numéro C4, Octobre 1981
Proceedings of the Ninth International Conference on Amorphous and Liquid Semiconductors
Page(s) C4-1085 - C4-1088
DOI https://doi.org/10.1051/jphyscol:19814238
Proceedings of the Ninth International Conference on Amorphous and Liquid Semiconductors

J. Phys. Colloques 42 (1981) C4-1085-C4-1088

DOI: 10.1051/jphyscol:19814238

ELECTRICAL AND OPTICAL PROPERTIES OF HYDROGENATED AMORPHOUS CARBON

D.I. Jones and A.D. Stewart

Carnegie Laboratory of Physics, The University, Dundee, DD1 4HN, Scotland, U.K.


Abstract
Carbon films have been prepared by the decomposition of methane, ethane, ethylene and acetylene in an r.f. glow discharge. Electrical conductivity and optical absorption measurements show a strong dependence on substrate temperature and on the gas used, whereas the hydrogen content of the films is found to be independent of these parameters. The addition of phosphine or diborane during preparation increases the conductivity.