Numéro
J. Phys. Colloques
Volume 49, Numéro C4, Septembre 1988
ESSDERC 88
18th European Solid State Device Research Conference
Page(s) C4-13 - C4-22
DOI https://doi.org/10.1051/jphyscol:1988402
ESSDERC 88
18th European Solid State Device Research Conference

J. Phys. Colloques 49 (1988) C4-13-C4-22

DOI: 10.1051/jphyscol:1988402

CMOS-TECHNOLOGY - STATUS, TRENDS AND APPLICATIONS

F. NEPPL et H.-J. PFLEIDERER

Siemens AG, Corporate Research and Development, Microelectronics, Otto-Hahn-Ring 6, D-8000 München 83, F.R.G.


Abstract
Todays CMOS technology is reviewed with respect to process architecture, acquired CMOS specific device know-how, design and applications. The process and device related problems of further miniaturization are discussed. Trends of innovative device design and technology concepts able to overcome these problems are summarized. Finally examples are given for future CMOS applications.