| Issue |
J. Phys. Colloques
Volume 47, Number C2, Mars 1986
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ
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|---|---|---|
| Page(s) | C2-133 - C2-136 | |
| DOI | https://doi.org/10.1051/jphyscol:1986219 | |
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ
J. Phys. Colloques 47 (1986) C2-133-C2-136
DOI: 10.1051/jphyscol:1986219
VG Scientific Ltd., Imberhorne Lane, GB-East Grinstead, RH19 1UB, W Sussex
J. Phys. Colloques 47 (1986) C2-133-C2-136
DOI: 10.1051/jphyscol:1986219
RECENT DEVELOPMENTS IN THE APPLICATION OF LIQUID METAL ION SOURCES TO SIMS
A.R. WAUGH, A.R. BAYLY, M. WALLS, P. VOHRALIK et D. FATHERSVG Scientific Ltd., Imberhorne Lane, GB-East Grinstead, RH19 1UB, W Sussex
Abstract
High-brightness liquid metal ion sources (LMIS) allow SIMS microprobe analysis with 50 nm spatial resolution at current densities > 1A/cm2. Chemical imaging of matrix and trace elements on the submicron scale is now achieved using a digital image storage system allowing picture processing and direct comparison of SEM and SIMS images using colour overlays. While high-sensitivity quadrupole mass spectrometers have been developed for SIMS imaging. the ultimate in sensitivity requires magnetic or time-of-flight mass spectrometers.