J. Phys. Colloques
Volume 50, Numéro C8, Novembre 198936th International Field Emission Symposium
|Page(s)||C8-549 - C8-554|
J. Phys. Colloques 50 (1989) C8-549-C8-554
PRECISION ION MILLING OF FIELD-ION SPECIMENSK.B. ALEXANDER, P. ANGELINI et M.K. MILLER
Metals and Ceramics Division, Oak Ridge National Laboratory, PO. Box 2008, Oak Ridge, TN 37831-6376, U.S.A.
The advantages and disadvantages of a precision ion milling system for the fabrication of field-ion specimens have been examined. This technique may be used on a wide variety of materials. As precise control over the ion beam position is possible, the specimen shape can be sculpted to a desired end form. Repeated ion milling and TEM examination is simplified since the same specimen holder is used for both processes. This technique is ideal for positioning a feature of interest at the specimen apex.