| Numéro |
J. Phys. Colloques
Volume 50, Numéro C8, Novembre 1989
36th International Field Emission Symposium
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|
|---|---|---|
| Page(s) | C8-549 - C8-554 | |
| DOI | https://doi.org/10.1051/jphyscol:1989895 | |
36th International Field Emission Symposium
J. Phys. Colloques 50 (1989) C8-549-C8-554
DOI: 10.1051/jphyscol:1989895
Metals and Ceramics Division, Oak Ridge National Laboratory, PO. Box 2008, Oak Ridge, TN 37831-6376, U.S.A.
J. Phys. Colloques 50 (1989) C8-549-C8-554
DOI: 10.1051/jphyscol:1989895
PRECISION ION MILLING OF FIELD-ION SPECIMENS
K.B. ALEXANDER, P. ANGELINI et M.K. MILLERMetals and Ceramics Division, Oak Ridge National Laboratory, PO. Box 2008, Oak Ridge, TN 37831-6376, U.S.A.
Abstract
The advantages and disadvantages of a precision ion milling system for the fabrication of field-ion specimens have been examined. This technique may be used on a wide variety of materials. As precise control over the ion beam position is possible, the specimen shape can be sculpted to a desired end form. Repeated ion milling and TEM examination is simplified since the same specimen holder is used for both processes. This technique is ideal for positioning a feature of interest at the specimen apex.