| Numéro |
J. Phys. Colloques
Volume 50, Numéro C8, Novembre 1989
36th International Field Emission Symposium
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|---|---|---|
| Page(s) | C8-497 - C8-500 | |
| DOI | https://doi.org/10.1051/jphyscol:1989885 | |
36th International Field Emission Symposium
J. Phys. Colloques 50 (1989) C8-497-C8-500
DOI: 10.1051/jphyscol:1989885
Precision Engineering Center and Department of Materials Science North Carolina State University, Box 7918, Raleigh, NC 27695, U.S.A.
J. Phys. Colloques 50 (1989) C8-497-C8-500
DOI: 10.1051/jphyscol:1989885
A WALKING, SCANNING TUNNELING MICROSCOPE COMBINED WITH A FOCUSED ION BEAM
G.M. SHEDD et P.E. RUSSELLPrecision Engineering Center and Department of Materials Science North Carolina State University, Box 7918, Raleigh, NC 27695, U.S.A.
Abstract
A walking, concentric-tube STM has been designed to interface with an FIB. The outer tube, which stands upright on 3 spherical feet, supports the inner tube and serves as an inertial stepper, allowing the STM to move laterally relative to a sample. The ion beam can pass down through the center of the inner tube, which operates as a conventional tube scanner with the STM tip at its lower end. The STM walks distances of mm with µm-scale resolution, resolves the pyrolytic graphite lattice, and can image regions of up to 3.5 x 3.5 µm.