Numéro
J. Phys. Colloques
Volume 47, Numéro C2, Mars 1986
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ
Page(s) C2-493 - C2-498
DOI https://doi.org/10.1051/jphyscol:1986275
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ

J. Phys. Colloques 47 (1986) C2-493-C2-498

DOI: 10.1051/jphyscol:1986275

THE ORNL ATOM PROBE

M.K. MILLER

Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, U.S.A.


Abstract
The ORNL Atom Probe is a microanalytical tool for studies in materials science. The instrument is a combination of a customized version of the vacuum system of the VG FIM-100 atom probe, an ORNL-designed microcomputer-controlled digital timing system, and a double curved CEMA Imaging Atom Probe detector. The atom probe combines four instruments into one - namely a field ion microscope, an energy compensated time-of-flight mass spectrometer, an imaging atom probe, and a pulsed laser atom probe.