| Numéro |
J. Phys. Colloques
Volume 47, Numéro C2, Mars 1986
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ
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| Page(s) | C2-431 - C2-436 | |
| DOI | https://doi.org/10.1051/jphyscol:1986266 | |
32 nd International Field Emission Symposium / 32ème Symposium International d'Emission de Champ
J. Phys. Colloques 47 (1986) C2-431-C2-436
DOI: 10.1051/jphyscol:1986266
1 The Institute of Scientific and Industrial Research, Osaka University, Suita, Osaka, Japan
2 The Institute for Solid State Physics, The University of Tokyo, Minato-ku, Tokyo, Japan
J. Phys. Colloques 47 (1986) C2-431-C2-436
DOI: 10.1051/jphyscol:1986266
SPUTTERING OF A FIM SPECIMEN BY IMAGING GASES
S. NAKAMURA1, T. HASHIZUME2 et T. SAKURAI21 The Institute of Scientific and Industrial Research, Osaka University, Suita, Osaka, Japan
2 The Institute for Solid State Physics, The University of Tokyo, Minato-ku, Tokyo, Japan
Abstract
It has been known for some time that imaging gases of heavier masses sputter off surface atoms during the imaging. We have investigated this phenomenon in detail using an atom-probe. We have conclusively shown that the bright spots appeared randomly after exposure to the imaging gas correspond to WHe molecular complex on the surface displaced by the sputtering and that its number density is a unique function of imaging gas pressure, exposure time and dc holding field.