J. Phys. Colloques
Volume 50, Number C8, Novembre 198936th International Field Emission Symposium
|Page(s)||C8-211 - C8-216|
J. Phys. Colloques 50 (1989) C8-211-C8-216
A NEW MICROTIP FOR STMY. AKAMA1, E. NISHIMURA1, A. SAKAI1, N. SANO2 et T. SAKURAI2
1 Toshiba ULSI Research Center 1 Komukai Toshiba-cho, Kawasaki 210, Japan
2 The Institute for Solid State Physics, The University of Tokyo 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
An electron-beam deposition in SEM has been successfully applied to make a new type of STM microtip of submicron diameter. This microtip has a straight shank and enables us to obtain low-distorted STM images of microfabricated patterns. Analyses of the microtip by TEM, Auger and atom-probe indicate that the microtip is amorphous and mainly consists of carbon, oxygen and hydrogen.