| Issue |
J. Phys. Colloques
Volume 47, Number C7, Novembre 1986
33rd International Field Emission Symposium / 33ème Symposium International d'Emission de Champ
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|---|---|---|
| Page(s) | C7-389 - C7-397 | |
| DOI | https://doi.org/10.1051/jphyscol:1986766 | |
33rd International Field Emission Symposium / 33ème Symposium International d'Emission de Champ
J. Phys. Colloques 47 (1986) C7-389-C7-397
DOI: 10.1051/jphyscol:1986766
1 Laboratoire de Microstructures et de Microélectronique, Avenue Henri Ravera, F-92220 Bagneux, France
2 Oregon Graduate Center, 19600 Von Neumann Dr, Beaverton, OR 97006, U.S.A.
J. Phys. Colloques 47 (1986) C7-389-C7-397
DOI: 10.1051/jphyscol:1986766
FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE
G. BENASSAYAG1, J. ORLOFF2 et L.W. SWANSON21 Laboratoire de Microstructures et de Microélectronique, Avenue Henri Ravera, F-92220 Bagneux, France
2 Oregon Graduate Center, 19600 Von Neumann Dr, Beaverton, OR 97006, U.S.A.
Abstract
A gold LMIS has been used in the charged droplet emission mode with a single lens focusing column operating at 20 kV beam voltage to achieve a deposit size at the target of 2.3 to 6.0 depending on the exposure time. The net mass deposit rate maximized at 1.5 µm3/s. From the focusing characteristics an energy spread of 50 V and an energy deficit of 350 to 500 V could be inferred for the charged droplet beam.