| Numéro |
J. Phys. Colloques
Volume 50, Numéro C7, Octobre 1989
X-ray and Neutron Scattering from Surfaces and Thin FilmsProceedings of the International Conference on Surface and Thin Film studies using Glancing-Incidence X-ray and Neutron Scattering |
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|---|---|---|
| Page(s) | C7-197 - C7-201 | |
| DOI | https://doi.org/10.1051/jphyscol:1989720 | |
X-ray and Neutron Scattering from Surfaces and Thin Films
Proceedings of the International Conference on Surface and Thin Film studies using Glancing-Incidence X-ray and Neutron Scattering
J. Phys. Colloques 50 (1989) C7-197-C7-201
DOI: 10.1051/jphyscol:1989720
1 Department of Physical Chemistry, University of Bristol, Cantock's Close, GB-Bristol BS8 1TS, Great-Britain
2 ICI, Wilton Materials Research Centre, P.O. Box 90, Wilton, Middlesbrough, GB-Cleveland TS6 8JE, Great-Britain
Proceedings of the International Conference on Surface and Thin Film studies using Glancing-Incidence X-ray and Neutron Scattering
J. Phys. Colloques 50 (1989) C7-197-C7-201
DOI: 10.1051/jphyscol:1989720
NEUTRON REFLECTION FROM AMORPHOUS HYDROGENATED CARBON FILMS
M.J. GRUNDY1, R.M. RICHARDSON1, G. BEAMSON2, W.J. BRENNAN2, J. HOWARD2 et M. O'NEILL21 Department of Physical Chemistry, University of Bristol, Cantock's Close, GB-Bristol BS8 1TS, Great-Britain
2 ICI, Wilton Materials Research Centre, P.O. Box 90, Wilton, Middlesbrough, GB-Cleveland TS6 8JE, Great-Britain
Abstract
Neutron reflectivity measurements have been used to study the thickness and composition of amorphous carbon films. Comparison of films made by deposition from CH4 and CD4 doped argon plasmas has enabled the hydrogen content to be determined. Variation in the plasma conditions were found to give a range of x (where the empirical formula is CHx) from 0.4 to 0.7.