| Numéro |
J. Phys. Colloques
Volume 48, Numéro C6, Novembre 1987
34th International Field Emission Symposium / 34ème Symposium International d'Emission de Champ
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|---|---|---|
| Page(s) | C6-247 - C6-251 | |
| DOI | https://doi.org/10.1051/jphyscol:1987640 | |
34th International Field Emission Symposium / 34ème Symposium International d'Emission de Champ
J. Phys. Colloques 48 (1987) C6-247-C6-251
DOI: 10.1051/jphyscol:1987640
Department of Systems Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan
J. Phys. Colloques 48 (1987) C6-247-C6-251
DOI: 10.1051/jphyscol:1987640
FIELD IONIZATION MASS SPECTROMETRY OF ORGANIC PLASMAS
H. Hayashi, H. Iwai et F. OkuyamaDepartment of Systems Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan
Abstract
It is demonstrated that field ionization mass spectrometry has a potential application for the detection of neutral species involved in organic plasmas. In FI mass spectra of r.f. glow discharge plasmas of aromatic compounds, reaction products were detected mainly at higher mass regions, reflecting that polymerization reactions were leading processes in these plasmas. For olefine compounds, on the other hand, signals due to reaction products appeared in a wide mass range, thus indicating that decomposition reactions, too, were strongly enhanced in the plasmas of these compounds.