Supplément au Journal de Physique Colloques

DEGRADATION OF THE POLY-Si/SILICIDE STRUCTURE IN ADVANCED MOS-TECHNOLOGIES

P. LIPPENS, K. MAEX, L. VAN den HOVE, R. DE KEERSMAECKER, V. PROBST, W. KOPPENOL and W. van der WEG

J. Phys. Colloques, 49 C4 (1988) C4-191-C4-194

DOI: 10.1051/jphyscol:1988439

P. LIPPENS

K. MAEX

L. VAN den HOVE

R. DE KEERSMAECKER

V. PROBST

W. KOPPENOL

W. van der WEG

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