Supplément au Journal de Physique Colloques

MICROSTRUCTURE OF Si₃N₄ FILMS DEPOSITED ON VARIOUS SUBSTRATES BY CVD

F. ANXIONNAZ, M. PARLIER, A. RIVIERE and M. LANCIN

J. Phys. Colloques, 47 C1 (1986) C1-303-C1-308

DOI: 10.1051/jphyscol:1986144

F. ANXIONNAZ

M. PARLIER

A. RIVIERE

M. LANCIN

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)