Numéro |
J. Phys. Colloques
Volume 50, Numéro C8, Novembre 1989
36th International Field Emission Symposium
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Page(s) | C8-67 - C8-72 | |
DOI | https://doi.org/10.1051/jphyscol:1989812 |
36th International Field Emission Symposium
J. Phys. Colloques 50 (1989) C8-67-C8-72
DOI: 10.1051/jphyscol:1989812
Naval Research Laboratory, Washington, DC 20375-5000, U.S.A.
J. Phys. Colloques 50 (1989) C8-67-C8-72
DOI: 10.1051/jphyscol:1989812
FIELD EMITTER ARRAYS - MORE THAN A SCIENTIFIC CURIOSITY ?
H.F. GRAYNaval Research Laboratory, Washington, DC 20375-5000, U.S.A.
Abstract
Field Emitter Arrays (FEAs) have become the basis of a new microelectronics technology which we have named Vacuum Microelectronics. It combines standard solid-state fabrication and processing with vacuum ballistic electron transport of field emitted electrons. It promises to extend the limits of todays integrated circuit technology and to address new applications such as flat panel displays and millimeter-wave amplification. FEAs also promise the scientific community a new class of electron sources which have the following properties : large current densities, narrow energy spread, low extraction voltages, integral focussing and deflection, optical excitation, and the possibility of multiple beams from a single chip.