| Numéro |
J. Phys. Colloques
Volume 48, Numéro C6, Novembre 1987
34th International Field Emission Symposium / 34ème Symposium International d'Emission de Champ
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| Page(s) | C6-577 - C6-582 | |
| DOI | https://doi.org/10.1051/jphyscol:1987694 | |
34th International Field Emission Symposium / 34ème Symposium International d'Emission de Champ
J. Phys. Colloques 48 (1987) C6-577-C6-582
DOI: 10.1051/jphyscol:1987694
VG IONEX Ltd., Charles Avenue, Maltings Park, Burgess Hill West Sussex, RH15 9TQ, U.K.
J. Phys. Colloques 48 (1987) C6-577-C6-582
DOI: 10.1051/jphyscol:1987694
A TIME-OF-FLIGHT MASS SPECTROMETER FOR SIMS AND FIELD IONISED NEUTRAL ANALYSIS USING A PULSED LMIS
A.R. Waugh, D.R. Kingham, C.H. Richardson et M. GoffVG IONEX Ltd., Charles Avenue, Maltings Park, Burgess Hill West Sussex, RH15 9TQ, U.K.
Abstract
A new surface analysis instrument has been developed using an energy-compensated time-of-flight mass spectrometer. Samples are ionised for analysis either by microfocussed laser irradiation or by sputtering with a microfocussed (< 0.25 µm) mass-filtered beam of Ga+ ions from a liquid metal ion source. A framestore-based data system allows the simultaneous capture o f both SIMS mass spectra and mass-resolved ion images. Data are presented illustrating both SIMS and Laser Microprobe performance. Data are also presented showing enhanced ion yield from the sputtering of a gold tip, due to field ionisation of sputtered neutrals.