| Numéro |
J. Phys. Colloques
Volume 47, Numéro C7, Novembre 1986
33rd International Field Emission Symposium / 33ème Symposium International d'Emission de Champ
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|---|---|---|
| Page(s) | C7-251 - C7-255 | |
| DOI | https://doi.org/10.1051/jphyscol:1986743 | |
33rd International Field Emission Symposium / 33ème Symposium International d'Emission de Champ
J. Phys. Colloques 47 (1986) C7-251-C7-255
DOI: 10.1051/jphyscol:1986743
Department of Physics, Chalmers University of Technology, S-412 96 Göteborg, Sweden
J. Phys. Colloques 47 (1986) C7-251-C7-255
DOI: 10.1051/jphyscol:1986743
PLANAR MAGNETRON SPUTTERING OF TITANIUM NITRIDE ON HIGH SPEED STEEL
J. SKOGSMO, P. LINDBLAD et H. NORDENDepartment of Physics, Chalmers University of Technology, S-412 96 Göteborg, Sweden
Abstract
A method to prepare needle-shaped high speed steel specimens and to deposit thin coatings of TiN on them has been developed. The specimens were examined by analytical electron microscopy and atom-probe field-ion microscopy.