| Numéro |
J. Phys. Colloques
Volume 47, Numéro C1, Février 1986
Thirteenth International Conference on Science of Ceramics
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|---|---|---|
| Page(s) | C1-515 - C1-519 | |
| DOI | https://doi.org/10.1051/jphyscol:1986177 | |
J. Phys. Colloques 47 (1986) C1-515-C1-519
DOI: 10.1051/jphyscol:1986177
ON THE MECHANISM OF SILICON NITRIDATION IN THE PRESENCE OF ZrO2
K. RUNDGREN1 et R. POMPE21 Department of Inorganic Chemistry, Chalmers University of Technology and University of Göteborg, S-412 96 Göteborg, Sweden
2 The Swedish Institute of Silicate Research, Box 5403, S-402 29 Göteborg, Sweden
Résumé
Le présent travail concerne les réactions entre Si et ZrO2 susceptibles d'intervenir pendant la nitruration du silicium et pouvant affecter les produits de réaction. Les essais d'analyse thermique, de dilatométrie et de diffraction des rayons X montrent que Si réagit avec ZrO2 pour donner ZrSiO4 et ZrSi2-x : 2ZrO2 + (3-x)Si → ZrSiO4 + ZrSi2-x Ultérieurement, la nitruration peut mener à une apparition de ZrN, Zr7O11N2 et Si2N2O. Certains de ces composés (par ex. ZrN et Zr7O11N2) pourraient diminuer la resistance à l'oxydation du matériau fritté.
Abstract
The present work addresses the interaction between Si and ZrO2 which may occur during the nitridation stage of silicon and can affect the final reaction products. Using the thermoanalytical methods combined with X-ray diffractometry it has been shown that the Si, parallel to the nitride formation, disproportionates in the presence of ZrO2 forming ZrSiO4 and ZrSi2-x according to 2ZrO2 + (3-x)Si → ZrSiO4 + ZrSi2-x It is shown further that these reaction products form ZrN, Zr7O11N2 and Si2N2O during the nitridation. ZrO2 thus affects the nitridation so that less desirable by-products are introduced (i.e. ZrN, Zr7O11N2) which may cause a decreased oxidation resistance of the sintered body.