J. Phys. Colloques
Volume 42, Numéro C4, Octobre 1981Proceedings of the Ninth International Conference on Amorphous and Liquid Semiconductors
|Page(s)||C4-361 - C4-363|
J. Phys. Colloques 42 (1981) C4-361-C4-363
INFRARED VIBRATIONAL SPECTRA OF CHLORINATED AND HYDROGENATED AMORPHOUS SILICONS. Kalem, J. Chevallier, S. Al Dallal and J. Bourneix
Laboratoire de Physique des Solides, C.N.R.S., 1, place Aristide Briand, 92190 Meudon-Bellevue, France
The infrared spectra of chlorinated and hydrogenated amorphous silicon have been measured. In addition to the hydrogen induced bands at 2110, 1990, 885, 840 and 640 cm-1, we observe two new modes at 545 cm-1 (Si-Cl stretching) and 500 cm-1 ( Si TO modes induced by chlorine). Observation of the 545 cm-1 band proves that chlorine acts as a dangling bond terminator. Upon annealing, some of the Si-Cl groups transform into SiCl4 molecules (SiCl4 stretching at 615 cm-1). A good agreement is found between the total amount of chlorine determined by electron microprobe analysis and the value estimated from the integrated strength of the Si-Cl stretching mode.