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AN INFLUENCE OF DOPING ON THE KINETICS OF BPSG DEPOSITION PROCESS AND THE PROPERTIES OF THE DEPOSITED LAYER

P.B. GRABIEC and S.M. PIETRUSZKO

J. Phys. Colloques, 50 C5 (1989) C5-585-C5-593

DOI: 10.1051/jphyscol:1989569

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