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SELECTIVE ETCHING OF n-TYPE GaAs IN A CrO₃-HF-H₂O SYSTEM UNDER LASER ILLUMINATION

J.L. Weyher and J. Van de Ven

J. Phys. Colloques, 43 C5 (1982) C5-313-C5-319

DOI: 10.1051/jphyscol:1982536

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