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Cited article:

PYROLYTIC DECOMPOSITION OF SILANE ON LASER-IRRADIATED SILICA SUBSTRATES

D. TONNEAU, Y. PAULEAU, G. AUVERT

J. Phys. Colloques, 50 C5 (1989) C5-637-C5-645

DOI: https://doi.org/10.1051/jphyscol:1989574

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This article has been cited by the following article(s):

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Y. Pauleau and D. Tonneau
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies 223 (2002)
https://doi.org/10.1007/978-94-010-0353-7_10