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Cited article:

Plasma-hydrogenation effects and the thickness dependence of electrical properties and E.S.R. in undoped CVD a-Si

S. Hasegawa, D. Ando, Y. Kurata and T. Shimizu
Philosophical Magazine B 47 (2) 139 (1983)
https://doi.org/10.1080/13642812.1983.9728426