Issue
J. Phys. Colloques
Volume 42, Number C4, Octobre 1981
Proceedings of the Ninth International Conference on Amorphous and Liquid Semiconductors
Page(s) C4-997 - C4-1000
DOI https://doi.org/10.1051/jphyscol:19814217
Proceedings of the Ninth International Conference on Amorphous and Liquid Semiconductors

J. Phys. Colloques 42 (1981) C4-997-C4-1000

DOI: 10.1051/jphyscol:19814217

AMORPHOUS VANADIUM OXIDES BY CVD : PREPARATION, ELECTRICAL AND MAGNETIC PROPERTIES

T. Szörényi, K. Bali and I. Hevesi

Research Group on Luminescence and Semiconductors, Hungarian Academy of Sciences, Szeged, Hungary


Abstract
Chemical vapour deposition of VOCl3 with H2O in controlled atmosphere is a unique method in producing amorphous vanadium oxides that contain only V5+ and V4+ ions with continuously varying valence ratio /c/ between <0.02 and ≈ 1.0. The room temperature d.c. conductivity of as prepared V2O5 films ranges between 10-5 and 10-3 ohm-1m-1 and is strongly dependent on preparation conditions. Increasing the valence ratio the conductivity first increases to ≈ 10-2 ohm-lm-1, then declines to 10-4 ohm-lm-1. EPR spectra indicate that the environment of V4+ ions is not identical in films of different compositions.