Supplément au Journal de Physique Colloques

AMORPHOUS SILICON NITRIDE THIN FILMS PERFORMED IN TWO PECVD EXPERIMENTAL DEVICES

J. L. JAUBERTEAU, M. I. BARATON, MM. GERBIER, P. QUINTARD, J. DESMAISON, J. AUBRETON and A. CATHERINOT

J. Phys. Colloques, 50 C5 (1989) C5-657-C5-664

DOI: 10.1051/jphyscol:1989576

J. L. JAUBERTEAU

M. I. BARATON

MM. GERBIER

P. QUINTARD

J. DESMAISON

J. AUBRETON

A. CATHERINOT

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