PLASMA ANODISATION OF SILICON FOR ADVANCED VLSI S. TAYLOR, W. ECCLESTON, J. RINGNALDA, D.M. MAHER, D.J. EAGLESHAM, C.J. HUMPHREYS et D.J. GODFREY J. Phys. Colloques, 49 C4 (1988) C4-393-C4-396 DOI: 10.1051/jphyscol:1988482
