Supplément au Journal de Physique Colloques

SHALLOW DOPING PROFILES FOR HIGH-SPEED BIPOLAR TRANSISTORS

K. EHINGER, H. KABZA, J. WENG, M. MIURA-MATTAUSCH, I. MAIER, H. SCHABER and J. BIEGER

J. Phys. Colloques, 49 C4 (1988) C4-109-C4-112

DOI: 10.1051/jphyscol:1988423

K. EHINGER

H. KABZA

J. WENG

M. MIURA-MATTAUSCH

I. MAIER

H. SCHABER

J. BIEGER

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