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GROWTH AND STRUCTURE OF NONCRYSTALLINE SiO₂ FILMS ON SILICON

A.G. Revesz, B.J. Mrstik and H.L. Hughes

J. Phys. Colloques, 46 C8 (1985) C8-495-C8-498

DOI: 10.1051/jphyscol:1985877

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