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ANALYSIS AND ORIGIN OF POINT DEFECTS IN SILICON AFTER LIQUID PHASE TRANSIENT ANNEALING

A. Mesli, J.C. Muller and P. Siffert

J. Phys. Colloques, 44 C5 (1983) C5-281-C5-295

DOI: 10.1051/jphyscol:1983543

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