MORPHOLOGY AND RESISTIVITY OF CVD POLYCRYSTALLINE SILICON LAYERS CONTAINING CARBON M. Hendriks, S. Radelaar, Th.H. de Keijser et R. Delhez J. Phys. Colloques, 43 C1 (1982) C1-307-C1-312 DOI: 10.1051/jphyscol:1982141