Supplément au Journal de Physique Colloques

ANNEALING AND HYDROGENATION BEHAVIOUR OF EVAPORATED AND SPUTTERED HIGH-PURITY AMORPHOUS SILICON FILMS

N. Kniffler, W.W. Müller, J.M. Pirrung, N. Hänisch, B. Schröder and J. Geiger

J. Phys. Colloques, 42 C4 (1981) C4-811-C4-814

DOI: 10.1051/jphyscol:19814178

N. Kniffler

W.W. Müller

J.M. Pirrung

N. Hänisch

B. Schröder

J. Geiger

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