A SELF ALIGNED CONTACT PROCESS WITH IMPROVED SURFACE PLANARIZATION K. H. KÜSTERS, W. SESSELMANN, H. MELZNER et B. FRIESELJ. Phys. Colloques, 49 C4 (1988) C4-503-C4-506DOI: https://doi.org/10.1051/jphyscol:19884104
