TECHNIQUES FOR PRODUCING DEFECT-FREE SOI BY DUAL ELECTRON BEAM HEATING OF DEPOSITED POLYSILICON J. R. Davis, R. A. McMahon et H. AhmedJ. Phys. Colloques, 44 C5 (1983) C5-337-C5-341DOI: https://doi.org/10.1051/jphyscol:1983550
