ELECTRON SPIN RESONANCE INVESTIGATION OF THE EFFECTS OF THE H2+ IMPLANTATION AND DIFFUSION ONE THE LASER INDUCED DEFECTS IN VIRGIN SILICON A. Goltzene, B. Meyer, C. Schwab, J. C. Muller et P. SiffertJ. Phys. Colloques, 44 C5 (1983) C5-307-C5-311DOI: https://doi.org/10.1051/jphyscol:1983546
