NONEQUILIBRIUM SOLUBILITY AND SEGREGATION IN ION IMPLANTED, LASER ANNEALED SILICON S. R. Wilson, C. W. White, F. W. Young, Jr., B. R. Appleton et J. NarayanJ. Phys. Colloques, 41 C4 (1980) C4-91-C4-96DOI: https://doi.org/10.1051/jphyscol:1980416
