| Numéro |
J. Phys. Colloques
Volume 50, Numéro C8, Novembre 1989
36th International Field Emission Symposium
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|---|---|---|
| Page(s) | C8-507 - C8-512 | |
| DOI | https://doi.org/10.1051/jphyscol:1989887 | |
36th International Field Emission Symposium
J. Phys. Colloques 50 (1989) C8-507-C8-512
DOI: 10.1051/jphyscol:1989887
Department of Materials Science and Engineering. The Graduate School at Nagatsuta, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 227, Japan
J. Phys. Colloques 50 (1989) C8-507-C8-512
DOI: 10.1051/jphyscol:1989887
THE ATOM-PROBE WITH A FIELD EMISSION ELECTRON SPECTROMETER
O. NISHIKAWA, H. KOYAMA, N. KODAMA et M. TOMITORIDepartment of Materials Science and Engineering. The Graduate School at Nagatsuta, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 227, Japan
Abstract
The basic imaging process of FIM and STM is electron tunneling. Therefore, the clarification of tunneling properties of individual surface atoms is an essential requirement for the deduction of a true topography from a depicted image. Accordingly, a field emission electron energy analyzer was mounted behind the imaging screen of an atomprobe in order to clarify the tunneling property of a surface atom. The advantage of this arrangement is the ability to mass analyze apex atoms and examine the effect of adsorbed contaminants on the tunneling property. The preliminary examination indicates that the sensitivity and energy resolution of the analyzer are high enough for the study of adsorbed hydrogen on silicon.