SPECTROSCOPIC ELLIPSOMETRY AND RAMAN SCATTERING ANALYSIS OF Be SHALLOW IMPLANTATION IN GaAs M. Erman, P. Chambon, B. Prévot et C. Schwab J. Phys. Colloques, 44 C10 (1983) C10-261-C10-265 DOI: 10.1051/jphyscol:19831055