MOLECULAR ENGINEERING IN SEMICONDUCTOR TECHNOLOGY : BOROSILICATEGLASS BY DECOMPOSITION OF A MONOMOLECULAR PRECURSOR H. TREICHEL, O. SPINDLER et Th. KRUCK J. Phys. Colloques, 50 C5 (1989) C5-747-C5-756 DOI: 10.1051/jphyscol:1989590