Supplément au Journal de Physique Colloques

SUPERFICIAL-ENHANCED THERMAL NITRIDATION OF SiO₂ THIN FILMS

A. GLACHANT, B. BALLAND, A. RONDA, J.C. BUREAU and C. PLOSSU

J. Phys. Colloques, 49 C4 (1988) C4-413-C4-416

DOI: 10.1051/jphyscol:1988487

A. GLACHANT

B. BALLAND

A. RONDA

J.C. BUREAU

C. PLOSSU

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