Supplément au Journal de Physique Colloques

RAPID THERMAL PROCESSING OF ARSENIC-IMPLANTED POLYSILICON ON VERY THIN OXIDE

J.Y.-C. SUN, R. ANGELUCCI, C.Y WONG, G. SCILLA and E. LANDI

J. Phys. Colloques, 49 C4 (1988) C4-401-C4-404

DOI: 10.1051/jphyscol:1988484

J.Y.-C. SUN

R. ANGELUCCI

C.Y WONG

G. SCILLA

E. LANDI

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