Supplément au Journal de Physique Colloques

SCALLING OF TRENCH CAPACITOR CELL FOR NEXT GENERATION DRAMs

H.-M. MÜHLHOFF, C.M. ROGERS, P. MURKIN, M. ELAHY and S. RÖHL

J. Phys. Colloques, 49 C4 (1988) C4-525-C4-528

DOI: 10.1051/jphyscol:19884109

H.-M. MÜHLHOFF

C.M. ROGERS

P. MURKIN

M. ELAHY

S. RÖHL

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