Supplément au Journal de Physique Colloques

TiW AND Al CONTACTS TO SHALLOW p⁺ JUNCTIONS - A COMPARISON BETWEEN FURNACE AND RAPID THERMAL ANNEALING (RTA)

P. WIKLUND, U. WENNSTRÖM, H. NORSTRÖM, I. SUNI and A. LINDBERG

J. Phys. Colloques, 49 C4 (1988) C4-489-C4-494

DOI: 10.1051/jphyscol:19884101

P. WIKLUND

U. WENNSTRÖM

H. NORSTRÖM

I. SUNI

A. LINDBERG

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