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PICOSECOND LASER ANNEALING OF IMPLANTED Si AND GaAs : A COMPARATIVE STUDY WITH A RAMAN MICROPROBE

J. Sapriel, Y.I. Nissim and J.L. Oudar

J. Phys. Colloques, 44 C5 (1983) C5-187-C5-191

DOI: 10.1051/jphyscol:1983529

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