Supplément au Journal de Physique Colloques

CHARACTERIZATION OF DISLOCATIONS AND THEIR EFFECTS IN SILICON DEVICE TECHNOLOGY

M. Kittler, W. Seifert, E. Bugiel and H. Richter

J. Phys. Colloques, 44 C4 (1983) C4-437-C4-443

DOI: 10.1051/jphyscol:1983451

M. Kittler

W. Seifert

E. Bugiel

H. Richter

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