CMOS TECHNOLOGY USING PLASMA NITRIDED OXIDE AS A GATE DIELECTRIC A. STRABONI, M. BERENGUER, B. VUILLERMOZ, P. DEBENEST, A. VERNA et P. DARSJ. Phys. Colloques, 49 C4 (1988) C4-421-C4-424DOI: https://doi.org/10.1051/jphyscol:1988489
