DOPING OF SILICON WITH ARSENIC AND PHOSPHORUS FROM SPIN-ON SOURCES EXPOSED TO INCOHERENT LIGHT A. N. Larsen, V. E. Borisenko et L. D. NielsenJ. Phys. Colloques, 44 C5 (1983) C5-427-C5-431DOI: https://doi.org/10.1051/jphyscol:1983562
