SPECTROSCOPIC ELLIPSOMETRY AND RAMAN SCATTERING ANALYSIS OF Be SHALLOW IMPLANTATION IN GaAs M. Erman, P. Chambon, B. Prévot et C. SchwabJ. Phys. Colloques, 44 C10 (1983) C10-261-C10-265DOI: https://doi.org/10.1051/jphyscol:19831055
