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Cited article:

Fluorine Penetration into Amorphous SiO2Glass at SF6Atmosphere Using Q-Switched Nd:YAG and Excimer Laser Irradiations

Hamid Reza Dehghanpour and Parviz Parvin
Japanese Journal of Applied Physics 49 (7) 075803 (2010)
https://doi.org/10.1143/JJAP.49.075803