STUDY OF THE PREPARATION OF HIGH Tc SUPERCONDUCTING YBCO THIN FILMS BY A PLASMA-ASSISTED MOCVD PROCESS DING-KUN PENG, GUANG-YAO MENG, CHUN-BAO CAO, CHUN-LIN WANG, QI FANG, YUE-HUAN WU and YU-HENG ZHANG J. Phys. Colloques, 50 C5 (1989) C5-149-C5-153 DOI: 10.1051/jphyscol:1989521