Supplément au Journal de Physique Colloques

A TWO DIMENSIONAL MODEL FOR LPCVD REACTORS HYDRODYNAMICS AND MASS TRANSFER

C. VINANTE, P. DUVERNEUIL and J.P. COUDERC

J. Phys. Colloques, 50 C5 (1989) C5-35-C5-43

DOI: 10.1051/jphyscol:1989507

C. VINANTE

P. DUVERNEUIL

J.P. COUDERC

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