CONTROL OF THE FABRICATION STEPS OF InP MIS TRANSISTORS BY MEANS OF SCANNING PHOTOLUMINESCENCE MEASUREMENTS B. COMMERE, M. GARRIGUES, S.K. KRAWCZYK, C. LALLEMAND, K. SCHOHE and B. CANUT J. Phys. Colloques, 49 C4 (1988) C4-431-C4-436 DOI: 10.1051/jphyscol:1988491